Tronix Analytics
Arizona · Semiconductor environmental & process monitoring亞利桑那州 · 半導體環境與製程監測

Bridging instrumentation and execution.銜接先進儀器與現場執行。

Tronix Analytics delivers process gas, water and environmental monitoring for next-generation fabs — from analyzer selection and purification to on-site integration, validation and long-term support.Tronix Analytics 為新世代晶圓廠提供製程氣體、水質與環境監測服務——從分析儀選型、氣體純化,到現場整合、驗證與長期維運,一站完成。

Headquartered in Arizona總部設於亞利桑那州
Gas + Water & Environment, two solution tracks氣體+水質環境,雙軌解決方案
Backed by Asia-Pacific technology partners亞太技術股東支援
Fab monitoring · overview晶圓廠監測 · 總覽 All points within spec全點位符合規格
Simulated values for illustration only示意用模擬數值,非實際量測資料 --:--:--
What we do核心能力

Critical environment monitoring, compliance and system integration — delivered on site.關鍵環境監測、法規符合與系統整合——在現場落實。

Tronix Analytics was founded by industry veterans with an extensive track record in commercial leadership across the Asia-Pacific region. We bring that instrumentation know-how to Arizona's semiconductor corridor, close to the fabs we serve.Tronix Analytics 由具備亞太區商業領導實績的產業資深人士創立,將半導體儀器與系統整合的專業帶到亞利桑那州半導體聚落,就近服務晶圓廠客戶。

Critical environment monitoring關鍵環境監測

Ultra-high-purity gases, ultrapure and reclaim water, cleanroom airborne molecular contamination and stack emissions — measured continuously at the points that matter.超高純度氣體、超純水與回收水、潔淨室微污染(AMC)與煙囪排放——在關鍵點位連續量測。

Compliance you can document可佐證的法規符合

Monitoring designed around your permits, SEMI guidelines and internal specifications, with calibration records and data trails that stand up to audit.依據許可條件、SEMI 指引與廠內規格設計監測方案,並建立經得起稽核的校正紀錄與資料軌跡。

Advanced system integration先進系統整合

Analyzers, sampling systems, purifiers, controls and data — integrated into one working system, installed, commissioned and supported by our own engineers.分析儀、取樣系統、純化器、控制與資料平台,整合為一套可運轉的系統,由自有工程團隊安裝、試車與維護。

Where we measure監測點位

Monitoring points across the fab晶圓廠全廠監測點位圖

Select a point to see what is measured there and which systems apply. Gas flows in from the left, water from the utility level below, and exhaust leaves through abatement and the stack on the right.點選任一點位,即可查看該處量測項目與適用系統。氣體自左側供入,水系統位於下方公用設施層,廢氣則經右側處理設備與煙囪排放。

Schematic cross-section of a semiconductor fab with monitoring points 設計by Ai3000 Utility level · water systems公用設施層 · 水系統 UPW plant · Reclaim treatment超純水系統 · 回收水處理 RO · EDI · polish · RWMSRO · EDI · 精處理 · RWMS Wastewater treatment (WWT)廢水處理(WWT) CWMS at discharge放流口 CWMS 連續監測 to permitted outfall至許可放流口 city / raw water自來水/原水 Cleanroom · production level潔淨室 · 生產層 Sub-fab · gas & utilities次晶圓廠層 · 氣體與公用設施 Tool機台 Tool機台 Litho微影 Etch蝕刻 FFU ceiling · makeup air with chemical filtrationFFU 天花板 · 外氣化學濾網 AMC Gas cabinet氣櫃 VMB In-line purifier線上純化器LINETRON · CATTRON Analyzer rack分析儀機櫃O₂ · H₂O · THC · CO · CO₂ppb trace analysisppb 級微量分析 Abatement廢氣處理 AAS · scrubber Stack煙囪 THC monitor監測 VOCs oxidizerVOCs 觸媒氧化 Waste heat → power廢熱發電 Solvent valorization廢溶劑能源化 H₂ production氫氣製程 Bulk gas yard大宗氣體區 N₂ Ar H₂ Bulk purifier大宗氣體純化器 FACILITRON · FABTRON N₂ · Ar · H₂ · O₂ · He 1 2 3 4 5 6 7 8
Process & bulk gas製程與大宗氣體 Water水 Exhaust & energy廢氣與能源 Schematic — not to scale示意圖,非按比例
Solutions解決方案

Two solution tracks, one integration team.雙軌解決方案,同一支整合團隊。

Our portfolio integrates the technologies of our two founding shareholders — Tronic Purity, Inc. for electronic gas, and HUAYONG Company Limited (HYECO) for water and environmental monitoring.產品組合整合兩大創始股東的技術優勢——芯動能(Tronic Purity, Inc.)的電子氣體技術,與華泳股份有限公司(HUAYONG Company Limited, HYECO)的水質與環境監測技術。

Technology partners技術股東

Strategic partnerships with Asia-Pacific semiconductor equipment specialists.與亞太半導體設備專業廠商的策略合作。

Tronic Purity, Inc. (芯動能設備)

Hsinchu, Taiwan · est. 2020 · electronic gas solutions臺灣新竹 · 2020 年成立 · 電子氣體解決方案

Specialist in ultra-high-purity gas purification (granular hollow fiber, heated getter and catalyst purifiers), trace-level gas analysis and gas delivery — plus VOCs treatment, waste-solvent valorization, waste-heat-to-power and hydrogen production systems.專精超高純度氣體純化(顆粒狀空心纖維、加熱吸氣劑與觸媒式純化器)、微量氣體分析與氣體輸送,並提供 VOCs 處理、廢溶劑能源化、廢熱發電與氫能應用系統。

FABTRONGETTRONLINETRONCATTRONBall SAWEPD

HUAYONG Company Limited (HYECO)HUAYONG Company Limited(HYECO)華泳股份有限公司

Taichung, Taiwan · environmental monitoring automation臺灣臺中 · 淨零工程與環境監測自動化

Water quality and reclaim water monitoring systems, industrial wastewater treatment, cleanroom AMC monitoring, air abatement and stack THC monitoring, with on-line analyzers such as the HY-Amit urea analyzer and Shimadzu TOC-4200.水質與回收水監測系統、工業廢水處理、潔淨室 AMC 監測、廢氣處理與煙囪 THC 監測,並整合 HY-Amit 線上尿素分析儀、Shimadzu TOC-4200 等線上分析儀器。

CWMSRWMSWWTAMCAASTHC

Planning a new fab, a retrofit or a monitoring upgrade?規劃新廠、改建或監測系統升級?

Tell us the process, the parameters and the deadline. Our engineers will propose a monitoring and integration scope you can take straight into procurement.告訴我們製程、量測參數與時程,工程團隊將提出可直接納入採購程序的監測與整合範疇建議。

About Tronix Analytics關於 Tronix Analytics

Instrumentation know-how, executed on site.儀器專業,落實於現場。

Based in the rapidly expanding semiconductor hub of Arizona, Tronix Analytics is a specialized engineering and technical service champion. We bridge the gap between advanced instrumentation and flawless site execution for next-generation fabrication facilities.Tronix Analytics 立足於快速成長的亞利桑那州半導體聚落,是一家專業的工程與技術服務公司,致力於銜接先進儀器與完善的現場執行,服務新世代晶圓製造廠。

Our story公司起源

Founded by industry veterans, built for the fab floor.由產業資深人士創立,為晶圓廠現場而生。

Tronix Analytics was founded by industry veterans with an extensive track record in commercial leadership across the Asia-Pacific region — the market where the world's most demanding fabs set the standard for gas purity, water quality and contamination control.Tronix Analytics 由具備亞太區商業領導實績的產業資深人士創立。亞太區匯聚全球要求最嚴格的晶圓廠,也是氣體純度、水質與污染控制標準的制定者。

Our two founding shareholders bring complementary technology: Tronic Purity, Inc. (Hsinchu, Taiwan) in ultra-high-purity electronic gas purification, analysis and delivery, and HUAYONG Company Limited (HYECO; Taichung, Taiwan) in water, cleanroom and emissions monitoring automation. Tronix Analytics turns that portfolio into locally delivered engineering for Arizona.兩大創始股東技術互補:芯動能設備(Tronic Purity, Inc.,臺灣新竹)專精超高純度電子氣體純化、分析與輸送;華泳股份有限公司(HUAYONG Company Limited, HYECO,臺灣臺中)專精水質、潔淨室與排放監測自動化。Tronix Analytics 將此產品組合轉化為在亞利桑那州在地交付的工程服務。

We focus on critical environment monitoring, compliance and advanced system integration. Driven by agility, technical excellence and an entrepreneurial spirit, we are committed to empowering our clients to achieve maximum productivity and operational safety in the advanced manufacturing era.我們專注於關鍵環境監測、法規符合與先進系統整合,秉持敏捷、技術卓越與創業精神,協助客戶在先進製造時代達到最高生產力與營運安全。

"Bridging the gap between advanced instrumentation and flawless site execution."「銜接先進儀器與完善現場執行之間的落差。」
How we work核心價值

Agility敏捷

Small, senior teams that move at fab-construction speed — decisions on site, not in a queue.精簡而資深的團隊,以建廠時程的速度推進——在現場決策,而非排隊等待。

Technical excellence技術卓越

ppb-level measurement demands ppb-level discipline: sampling design, calibration and documentation done right the first time.ppb 等級的量測需要 ppb 等級的紀律:取樣設計、校正與文件一次到位。

Entrepreneurial spirit創業精神

We take ownership of outcomes — productivity and operational safety for the client, not just delivered equipment.我們對成果負責——客戶的生產力與營運安全,而不僅是交付設備。

Headquarters總部
Scottsdale, Arizona美國亞利桑那州 Scottsdale
Local engineering and service for the Phoenix-area semiconductor corridor就近服務鳳凰城地區半導體聚落
Focus專注領域
Semiconductor fabs晶圓廠與先進製造
Environmental, process gas and water monitoring for wafer and advanced manufacturing晶圓廠環境監測與製程氣體、水質監測
Founding shareholders創始股東
Tronic Purity · HYECO
Electronic gas solutions · environmental monitoring automation電子氣體解決方案 · 環境監測自動化
Scope服務範疇
Monitor · Comply · Integrate監測 · 合規 · 整合
From instrument selection to validated, maintained systems從儀器選型到完成驗證與持續維運的系統
Products & solutions產品與解決方案

Gas, water and environmental monitoring — one integrated portfolio.氣體、水質與環境監測——單一整合產品組合。

Our core products integrate the technology of our two founding shareholders, covering the gas dimension (Tronic Purity, Inc.) and the water & environment dimension (HUAYONG Company Limited, HYECO).核心產品整合兩大創始股東的技術優勢,涵蓋氣體(芯動能 Tronic Purity)與水質/環境(華泳 HYECO)兩大維度。

Category A · via Tronic Purity, Inc.類別 A · 技術來源:芯動能設備(Tronic Purity, Inc.)

Pure gas & gas monitoring solutions氣體純化、分析與輸送

A-1

Gas analytical systems氣體分析與監測儀器Gas Analytical Systems

Trace-level impurity analysis for ultra-high-purity gases, from analyzer selection to a fully integrated analytical system.超高純度氣體之微量雜質分析,從分析儀選型到完整整合的分析系統。

  • High-precision gas analyzers built on EPD technology and Ball SAW sensor technology.高精度氣體分析儀,搭載 EPD 技術與 Ball SAW 傳感器技術。
  • UHP impurity and trace component analysis — O₂, H₂O, THC, CO, CO₂ and other trace impurities, from ppt to percent level.超高純度(UHP)氣體雜質與微量成分分析——O₂、H₂O、THC、CO、CO₂ 等微量雜質,涵蓋 ppt 至百分比濃度。
  • Analytical system integration — sampling, calibration gas handling, enclosures, data and alarms as one system.分析系統整合——取樣、校正氣體、機櫃、資料與警報整合為單一系統。
Analyzer platforms integrated through our technology partner's portfolio:透過技術股東產品組合整合之分析儀平台:
AMETEK Process InstrumentsASDevicesBall WavePEAK LaboratoriesProcess InsightsServomexThermo Fisher
Source: Tronic Purity, Inc. — Gas Analytical資料來源:Tronic Purity, Inc.(芯動能)Gas Analytical 頁面
A-2

Gas purification systems高純度氣體純化系統Gas Purification Systems

Electronic-grade purifiers using granular hollow fiber technology, plus heated getter and heated catalyst purifiers for the toughest impurities.採用顆粒狀空心纖維(Granular Hollow Fiber)技術的電子級氣體純化器,並提供加熱吸氣劑式與加熱觸媒式純化器,處理最難去除的雜質。

  • Auto-regenerable purifiers (FABTRON, LABTRON) — no consumable parts, minimal power consumption.自動再生式純化器(FABTRON、LABTRON)——無耗材、低耗電。
  • Heated getter purifiers (GETTRON) for factory-scale and lab / analytical-instrument flows.加熱吸氣劑式純化器(GETTRON)——廠務級與實驗室/分析儀器級流量。
  • In-line and ambient bulk purifiers (LINETRON, FACILITRON) — the latter operating with no power required.線上式與常溫大宗氣體純化器(LINETRON、FACILITRON)——後者無需電力運轉。
  • Heated catalyst purifier (CATTRON) removing THC, H₂ and CO impurities to < 1 ppb.加熱觸媒式純化器(CATTRON)——將 THC、H₂ 與 CO 雜質去除至 < 1 ppb。
Source: Tronic Purity, Inc. — Gas Purification資料來源:Tronic Purity, Inc.(芯動能)Gas Purification 頁面
Purifier selector · by flow純化器選型 · 依流量

Which purifier fits your flow?您的流量適用哪一款純化器?

Enter a design flow and the table highlights every model whose published range covers it. Ranges are as published by Tronic Purity, Inc.; final selection depends on gas, inlet impurity and outlet specification.輸入設計流量,表格將標示所有公告範圍涵蓋該流量的機型。範圍依 Tronic Purity, Inc. 公告資料;最終選型仍須依氣體種類、入口雜質與出口規格決定。

Conversion used: 1 Nm³/h ≈ 16.67 L/min (normal conditions)換算基準:1 Nm³/h ≈ 16.67 L/min(標準狀態)
Model機型 Type型式 Published flow range公告流量範圍 Notes說明
FABTRONAuto-regenerable purifier自動再生式純化器10 – 20,000 Nm³/hGranular hollow fiber; auto-regeneration, no consumables顆粒狀空心纖維;自動再生、無耗材
LABTRONAuto-regenerable purifier自動再生式純化器100 – 500 slpmRegenerable, granular hollow fiber可再生,顆粒狀空心纖維
GETTRON (high flow)(高流量)Heated getter purifier加熱吸氣劑式純化器10 – 150 Nm³/hFactory-scale applications廠務級應用
GETTRON (low flow)(低流量)Heated getter purifier加熱吸氣劑式純化器1 – 400 slpmLab and analytical-instrument use實驗室與分析儀器用
LINETRONIn-line gas purifier線上式氣體純化器0.5 – 2,000 slpmPoint-of-use / line purification使用點/管線純化
FACILITRONAmbient bulk gas purifier常溫大宗氣體純化器10 – 1,000 Nm³/hNo power required無需電力
CATTRONHeated catalyst purifier加熱觸媒式純化器5 – 150 slpmRemoves THC, H₂ and CO to < 1 ppb去除 THC、H₂、CO 至 < 1 ppb
Ranges as published on tronicpurity.com (Gas Purification). Highlighting is a pre-selection aid, not a guarantee of fit.流量範圍依 tronicpurity.com(Gas Purification)公告;標示僅供初步選型參考,非適用性保證。
A-3

Gas delivery systems氣體輸送與控制系統Gas Delivery Systems

Specialty and electronic gas delivery and distribution integration — engineered, installed and commissioned as part of the same monitoring scope.特殊氣體/電子氣體輸送與配管整合系統——與監測範疇一併設計、安裝與試車。

  • Delivery and distribution integration for specialty and electronic gases, from source to point of use.特殊氣體與電子氣體之輸送與配管整合,自氣源至使用點。
  • Purity-aware design — purifiers and analyzers placed where the gas quality is actually decided.以純度為核心的設計——將純化器與分析儀配置於真正決定氣體品質之處。
  • Commissioning and documentation aligned with your fab's safety and quality procedures.試車與文件依廠內安全與品質程序辦理。
Source: Tronix Analytics design brief; Tronic Purity, Inc. — Gas Delivery資料來源:Tronix Analytics 網頁設計需求規格書;Tronic Purity, Inc. Gas Delivery 頁面
A-4

Sustainable energy & VOCs systems永續能源與廢氣處理技術Sustainable Energy & VOCs Systems

Environmental and new-energy equipment guided by sustainable development: purification, process efficiency, and circular use of energy and resources. All systems use a modular architecture for future capacity expansion.以永續發展為原則之環境與新能源設備:環境淨化、製程效率提升、能資源循環利用。全系列採模組化架構,可依未來產能彈性擴充。

  • VOCs treatment — low-temperature catalytic oxidation converting volatile organic compounds into CO₂ and H₂O.VOCs 揮發性有機物處理——低溫觸媒氧化,將揮發性有機物轉化為 CO₂ 與 H₂O。
  • Organic waste solvent valorization — high-temperature cracking with customizable product composition.廢有機溶劑能源化——高溫裂解,產物組成可依需求調整。
  • Waste heat to power (WHP) — converting waste heat into usable energy.廢熱發電(WHP)——將廢熱轉換為可用能源。
  • Hydrogen production — reforming-based H₂ production systems.氫氣製程——以重組法為基礎之氫氣生產系統。
Source: Tronic Purity, Inc. — Sustainability Technologies資料來源:Tronic Purity, Inc.(芯動能)Sustainability 頁面
Engineering & system integration services工程與系統整合服務

Site execution and compliance, end to end.現場執行與法規符合,全程負責。

On-site installation, system integration, compliance validation and maintenance — one accountable team from the first site survey to years of operation.現場安裝、系統整合、合規驗證與保養運維——自首次現場勘查至多年營運,由同一團隊負責到底。

How a project runs專案執行流程

Five stages, each with a defined deliverable.五個階段,每階段皆有明確交付成果。

01

Assess & specify評估與規格

Site survey, sampling-point definition and review of permits, SEMI guidelines and internal specifications.現場勘查、取樣點定義,並檢視許可條件、SEMI 指引與廠內規格。

  • Monitoring point schedule監測點位清冊
  • Parameter & range specification參數與量測範圍規格
02

Design & integrate設計與整合

Analyzer and purifier selection, sampling systems, panels, controls and data connectivity.分析儀與純化器選型、取樣系統、盤體、控制與資料連線。

  • P&IDs and panel drawingsP&ID 與盤體圖說
  • Data / alarm architecture資料與警報架構
03

Install & commission安裝與試車

On-site installation, utility hook-up, leak and purity checks, calibration and start-up.現場安裝、公用設施接管、洩漏與純度檢查、校正與啟動。

  • Installation records安裝紀錄
  • Calibration certificates校正證明
04

Validate & comply驗證與合規

Site acceptance testing, verification against specification and documentation that stands up to audit.現場驗收測試、規格符合性驗證,以及經得起稽核的文件。

  • SAT report現場驗收報告
  • Compliance data trail合規資料軌跡
05

Operate & maintain運轉與維護

Preventive maintenance, recalibration, spare parts and local response for the life of the system.預防保養、再校正、備品與在地即時支援,貫穿系統生命週期。

  • Maintenance plan & logs保養計畫與紀錄
  • Service-level response服務等級回應
Services服務項目

What we take responsibility for.我們負責的範疇。

On-site installation現場安裝

Mechanical and electrical installation of analyzers, purifiers, sampling systems and monitoring cabinets by our own field engineers, coordinated with your construction and tool-install schedule.由自有現場工程師執行分析儀、純化器、取樣系統與監測機櫃之機械與電氣安裝,並配合建廠與機台安裝時程。

System integration系統整合

Gas, water and air monitoring integrated into one architecture: sampling, analyzers, controls, data historian and alarm interfaces to your FMCS / SCADA.將氣體、水質與空氣監測整合為單一架構:取樣、分析儀、控制、資料歷史紀錄,以及與廠務監控系統(FMCS/SCADA)之警報介面。

Compliance validation合規驗證

Verification that installed systems measure what the permit, guideline or internal spec requires — with calibration, traceability and documentation packages ready for audit.驗證已安裝系統確實量測許可、指引或廠內規格所要求之項目,並備妥校正、追溯與文件套件以供稽核。

Maintenance & operations保養運維

Preventive maintenance, recalibration, consumables and spare parts, remote diagnostics and local response — so monitoring data stays valid for the life of the fab.預防保養、再校正、耗材與備品、遠端診斷與在地回應,使監測資料於廠房生命週期內持續有效。

Need a scope and budget for your monitoring package?需要監測系統的範疇與預算?

Send us your parameter list or P&ID markup. We will return a monitoring point schedule and an integration scope you can put straight into procurement.提供參數清單或 P&ID 標註,我們將回覆監測點位清冊與整合範疇,可直接納入採購程序。

Contact us聯絡我們

Let's talk about your monitoring scope.與我們討論您的監測需求。

Tell us what you need to measure, where, and by when. An engineer — not a form queue — will reply.告訴我們需量測的項目、位置與時程,由工程師親自回覆。

Inquiry諮詢表單

Choose an inquiry type so the right engineer picks it up.請選擇諮詢類別,以便由對應領域的工程師處理。

Opens your email client with the details pre-filled.將開啟您的郵件程式並預先填入內容。
Thank you — your email draft is ready to send. We will reply within one business day.感謝您,郵件草稿已備妥可寄出。我們將於一個工作日內回覆。
Headquarters總部

Tronix Analytics Inc.

Scottsdale, Arizona, USA美國亞利桑那州 Scottsdale kerson.ke@tronixanalytics.com

Business hours: Monday – Friday, 8:00 – 17:00 (Arizona, MST).營業時間:週一至週五 8:00–17:00(亞利桑那州,MST)。